Low Temperature Millimeter-Wave Sintering of Aluminum Nitride with Oxide Additive of CaO-Al2O3-Yb2O3 System
Low Temperature Millimeter-Wave Sintering of Aluminum Nitride with Oxide Additive of CaO-Al2O3-Yb2O3 System
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DOI：
10.2497/jjspm.53.143
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发表时间：
2006-02
期刊：
影响因子：
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通讯作者：
T. Yoshioka;Y. Makino;S. Miyake
中科院分区：
文献类型：
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作者：
T. Yoshioka;Y. Makino;S. Miyake
采用28 GHz毫米波加热方法合成了CaO-Al_2O_3-Yb_2O_3系氧化物添加剂氮化铝。在1500℃的低温下保温120min，致密化程度大于95%(Td：理论密度)，导热系数接近150W/(m·K)。致密化温度的降低归因于Yb2O_3在添加氧化物中的主要加热作用，这是由于Yb_2O_3对毫米波的有效吸收。成功地合成了在1500℃下具有较高导热系数的氮化铝，为经济地制备氮化铝提供了可能。
Aluminum nitride with oxide additive of CaO-Al2O3-Yb2O3 system was synthesized by 28GHz millimeter-wave heating method. Densification over 95%TD (TD: theoretical density) and thermal conductivity close to 150W/(m·K) were attained at a low temperature of 1500°C for 120min. The lowering of densification temperature was attributed to the predominantly heating of Yb2O3 in additive oxide, which arises from the effective absorption of millimeter-wave into Yb2O3. The successful synthesis of AlN with fairly high thermal conductivity at 1500°C is suggested to be available for an economical manufacturing of AlN.