Absolute distance measurement using frequency-sweeping heterodyne interferometer calibrated by an optical frequency comb.

Absolute distance measurement using frequency-sweeping heterodyne interferometer calibrated by an optical frequency comb.
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DOI:
10.1364/ao.52.002042
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发表时间:
2013-04
期刊:
影响因子:
1.9
通讯作者:
Xuejian Wu;Haoyun Wei;Hongyuan Zhang;Li-bing Ren;Yan Li;Jitao Zhang
Xuejian Wu;Haoyun Wei;Hongyuan Zhang;Li-bing Ren;Yan Li;Jitao Zhang
中科院分区:
工程技术4区
文献类型:
--
作者:
Xuejian Wu;Haoyun Wei;Hongyuan Zhang;Li-bing Ren;Yan Li;Jitao Zhang

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我们提出了一种扫频外差干涉仪来测量绝对距离,该干涉仪基于一个可调频率的二极管激光器,该激光器由光学频率梳(OFC)和干涉相位测量系统校准。OFC对激光扫频过程进行了校正,校正范围为200 GHz,精度为1.3 kHz,得到了精确的时间合成波长1.499 mm。由模拟信号处理电路和数字相位计组成的干涉式相位测量系统,其相位差分辨率优于0.1°。由于激光频率是扫频的,通过测量干涉信号的相位差变化可以确定绝对距离。在实验室条件下,我们的实验方案在米距离上实现了微米精度。
We present a frequency-sweeping heterodyne interferometer to measure an absolute distance based on a frequency-tunable diode laser calibrated by an optical frequency comb (OFC) and an interferometric phase measurement system. The laser frequency-sweeping process is calibrated by the OFC within a range of 200 GHz and an accuracy of 1.3 kHz, which brings about a precise temporal synthetic wavelength of 1.499 mm. The interferometric phase measurement system consisting of the analog signal processing circuit and the digital phase meter achieves a phase difference resolution better than 0.1 deg. As the laser frequency is sweeping, the absolute distance can be determined by measuring the phase difference variation of the interference signals. In the laboratory condition, our experimental scheme realizes micrometer accuracy over meter distance.