On the magnetic saturation analyses of a micro linear switched-reluctance motor
On the magnetic saturation analyses of a micro linear switched-reluctance motor
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DOI：
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发表时间：
2004
影响因子：
2.1
通讯作者：
Cheng-Tsung Liu;Tsung-Shiun Chiang
中科院分区：
文献类型：
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作者：
Cheng-Tsung Liu;Tsung-Shiun Chiang
为了实现低成本和高运行精度的半导体制造业，一种新的微型线性开关磁阻电机（/spl μ/LSRM），可以集成到微机电系统（MEMS）的加工方案已被设计和研究。同时考虑电镀工艺后材料性能的退化和MEMS的几何约束，采用三维有限元分析方法对/spl mu/LSRM的磁饱和特性进行了详细分析。因此，在最可行的电机极形状和绕组激励水平下产生的推进力、法向力和引导力可以进行评估，以提供全面的设计和制造基础。
To achieve low cost and high operational precisions in semiconductor fabrication industry, a new micro linear switched-reluctance motor (/spl mu/LSRM) that can be integrated with the microelectromechanical system (MEMS) processing scheme has been designed and investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS being considered, magnetic saturation characteristics of the /spl mu/LSRM were carefully analyzed by three-dimensional finite element analysis. Hence, the generated propulsive, normal, and guidance forces at those of the most feasible motor pole shapes and winding excitation levels can be evaluated to provide a thorough design and fabrication basis.