Nonlinear oscillation characteristics of MEMS resonator
Nonlinear oscillation characteristics of MEMS resonator
复制标题
MEMS谐振器的非线性振荡特性
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
Ran Shi
中科院分区：
文献类型：
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作者：
Qin Shin;A. Qiu;Yan Su;Ran Shi
MEMS谐振器非线性振荡特性的研究具有重要意义，它影响谐振器和其他MEMS器件的性能。本文所研究的MEMS谐振器是由DETF和梳齿组成的静电MEMS谐振器。采用能量法推导了双馈可调谐滤波器的线性弹簧常数和非线性弹簧常数，建立了考虑非线性静电力、阻尼和非线性弹簧常数的非线性动力学模型。采用摄动分析和多尺度方法对非线性模型进行了分析，建立了频率与振幅的关系。数值仿真结果表明，DETF的宽度和阻尼比的增加，可以降低非线性。最后，对SOG工艺制作的MEMS谐振器进行了静电驱动和静电检测测试。实验结果验证了数值模拟的结果。
The study of nonlinear oscillation characteristics of MEMS resonator is important, which affects the performance of resonator and other MEMS devices. The MEMS resonator studied in this paper is electrostatic MEMS resonator which composed of DETF and combs. The linear spring constant and nonlinear spring constant of DETF are derived with energy method, and the nonlinear dynamics model is established including nonlinear electrostatic force, damping and nonlinear spring constant. The perturbation analysis and multi-scale method are adapted to analyze the nonlinear model, and the relationship between frequency and oscillation amplitude is established. The numerical simulation results indicate that the width of DETF and damping ratio are increased that can decrease the nonlinearity. At last, the MEMS resonator fabricated with SOG process are tested with method of electrostatic driven and electrostatic detection. The experiment results verify the numerical simulation results.