Superconducting properties of reactively sputtered NbCN thin films
Superconducting properties of reactively sputtered NbCN thin films
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DOI：
10.1109/tmag.1981.1061147
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发表时间：
1981
影响因子：
2.1
通讯作者：
T. Francavilla;S. Wolf;E. Skelton
中科院分区：
文献类型：
--
作者：
T. Francavilla;S. Wolf;E. Skelton
碳氮化铌薄膜是通过在氩气、反应气体（RG）气氛中对铌进行射频反应溅射来制备的，其中RG是氰和氮的混合物。通过俄歇分析测定，薄膜成分范围为 Nb 1 C x N 1-x ( 0.03\leq \times \leq0.5 )，碳含量大致跟踪氰分压。系统地改变成分和基底温度，并通过测量X射线结构、电阻率、超导转变温度T c 和临界磁场来研究所得薄膜。我们发现这些薄膜中微晶的系统择优取向取决于基底温度和 RG 与氩气的比率。增加任一数量都会导致微晶从
Niobium Carbonitride thin films have been prepared by rf reactive sputtering of niobium in ar argon, reactive-gas (RG) atmosphere where the RG is a mixture of cyanogen and nitrogen. Film composition ranged from Nb 1 C x N 1-x ( 0.03\leq \times \leq0.5 ) as determined by Auger analysis, the carbon content roughly tracking the cyanogen partial pressure. Composition and substrate temperature were systematically varied and the resultant films studied by measurements of x-ray structure, resistivity, superconducting transition temperature T c , and critical magnetic fields. We have found systematic preferential orientation of the crystallites in these films depending upon substrate temperature ana RG to argon ratio. Increasing either quantity causes the crystallites to reorient from the