Microelectromechanical disk resonators for direct detection of liquid-phase analytes
Microelectromechanical disk resonators for direct detection of liquid-phase analytes
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DOI：
10.1016/j.sna.2014.05.022
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发表时间：
2014-09-01
影响因子：
4.6
通讯作者：
Pourkamali, Siavash
中科院分区：
文献类型：
--
作者：
Mehdizadeh, Emad;Chapin, Jennifer C.;Pourkamali, Siavash
本文介绍了使用旋转模式MEMS谐振结构实时检测生物分子的初步测量结果，以及直接和具体测量液体中巯基封端的DNA分子浓度的能力。已经制造了在水溶液中具有类似于100的高品质因数（Q）的薄膜压电盘谐振器，并将其用作直接生物分子检测器，其可以解决MEMS谐振器在与液体直接接触时的低Q的问题。为了吸附硫醇封端的分子，在谐振器顶部表面上沉积金层。当在水溶液中形成巯基己醇单层时，实时记录了类似于10 kHz（3800 ppm）的逐渐频移，证明了这种结构作为高灵敏度生物传感器的潜力。除了使用圆盘谐振器（在水溶液中质量灵敏度高达19.3 ppm cm（2）/ng（65 Hz cm（2）/ng））检测靶单链DNA（ssDNA）序列之外，已经使用不同浓度的硫醇封端的DNA分子表征了这种装置的响应。对于官能化硫醇封端的ssDNA溶液的浓度的一个数量级的变化，观察到圆盘谐振器的测量频率偏移的类似于2X的差异。(C)2014爱思唯尔有限公司版权所有。
This paper presents preliminary measurement results for real-time detection of biomolecules using rotational-mode MEMS resonant structures and capability of such to directly and specifically measure concentration of thiol-terminated DNA molecules in liquid. Thin film piezoelectric disk resonators with quality factors (Q) as high as similar to 100 in aqueous solutions have been fabricated and utilized as direct biomolecular detectors that can address the problem of low Q for MEMS resonators when in direct contact with liquid. To adsorb thiol-terminated molecules, a gold layer is deposited on the top resonator surface. A gradual frequency shift of similar to 10 kHz (3800 ppm) was recorded in real-time while forming monolayers of mercaptohexanol in aqueous solution, demonstrating the potential of such structures as highly sensitive biosensors. Over and above detection of target single-stranded-DNA (ssDNA) sequences using the disk resonators (with mass sensitivities as high as 19.3 ppm cm(2)/ng (65 Hz cm(2)/ng) in aqueous solution), the response of such devices has been characterized using different concentrations of thiol-terminated DNA molecules. For one order of magnitude change in concentration of functionalizing thiol-terminated-ssDNA solution, similar to 2X difference in measured frequency shifts of the disk resonators was observed. (C) 2014 Elsevier B.V. All rights reserved.