Pole figure analysis from electron backscatter diffraction?an effective method of evaluating fiber-textured silicon thin films as seed layers for epitaxy
Pole figure analysis from electron backscatter diffraction?an effective method of evaluating fiber-textured silicon thin films as seed layers for epitaxy
复制标题
电子背散射衍射极图分析——评估作为外延种子层的纤维织构硅薄膜的有效方法
DOI:
10.7567/1882-0786/aafb26
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发表时间:
2019
影响因子:
2.3
通讯作者:
Usami Noritaka
中科院分区:
文献类型:
--
作者:
Hainey Mel;Robin Yoann;Amano Hiroshi;Usami Noritaka