Yong Sun: "Study of the Growth Mechanism of Narocrystalline Si:H Films Prepared by Reactive Hydrogen Plasma Sputtering of Silicon" Jpn. J. Appl. Phys.33. L1645-L1648 (1994)

Yong Sun: "Study of the Growth Mechanism of Narocrystalline Si:H Films Prepared by Reactive Hydrogen Plasma Sputtering of Silicon" Jpn. J. Appl. Phys.33. L1645-L1648 (1994)
复制标题

孙勇:“硅反应氢等离子体溅射制备纳米晶Si:H薄膜的生长机理研究”Jpn.

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献