Pulsed laser deposition of diamond-like carbon coatings for industrial tribological applications
Pulsed laser deposition of diamond-like carbon coatings for industrial tribological applications
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DOI：
10.1016/s0257-8972(03)00392-x
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发表时间：
2003-09
影响因子：
5.4
通讯作者：
J. Lackner;C. Stotter;W. Waldhauser;R. Ebner;W. Lenz;M. Beutl
中科院分区：
文献类型：
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作者：
J. Lackner;C. Stotter;W. Waldhauser;R. Ebner;W. Lenz;M. Beutl
本工作的目的是研究工业用低磨损类金刚石(DLC)涂层的结构、力学和摩擦学性能。采用脉冲激光沉积(PLD)方法，在不同硬度的钢(AISI1045H、B7、H13、D2、M2)上制备了非晶态无氢(a-C)和氢化(a-C：H)类金刚石涂层。因此，在Ar和C2H2气氛中，用1064 nm波长的Nd：YAG激光烧蚀了石墨靶。应用的PLD设备的高平均激光功率确保了沉积速度与其他物理气相沉积(PVD)技术相媲美。由于特定的工艺条件和使用纯钛粘结剂界面层，在室温下可以制备出与基材具有高附着力的涂层。用光学显微镜和扫描电子显微镜对涂层进行了研究，结果表明涂层表面质量高，涂层组织致密。X射线衍射分析表明，涂层为非晶态结构。用XPS分析了化学键的性质，表明存在不同数量的sp3碳键。与100Cr6轴承钢球的销盘磨损试验表明，a-C和a-C：H DLC涂层在所有不同的钢衬底上都具有良好的耐磨性。这些结果证明了PLD-DLC涂层在工具和机械零件领域用于高精度零件耐磨保护的适用性。
The aim of the present work is the investigation of the structural, mechanical and tribological properties of low-wear diamond-like carbon (DLC) coatings for industrial applications. Amorphous hydrogen-free (a-C) and hydrogenated (a-C:H) DLC coatings were coated onto various steel substrates (AISI 1045H, B7, H13, D2, M2) with hardness levels varying from 28 to 66 HRC, by employing the pulsed laser deposition (PLD) method. Therefore, graphite targets were ablated with the 1064 nm wavelength of an Nd:YAG laser in argon and C2H2atmospheres. The high mean laser power of the applied PLD equipment guarantees deposition rates competitive to other physical vapour deposition (PVD) techniques. Because of the specific process conditions and the use of pure titanium adhesive interface layers, coatings with high adhesion to the substrates were produced at room temperature. The investigations of the coatings by means of light and scanning electron microscopy reveals the high surface quality and extremely dense coating structures. XRD measurements indicated the amorphous structure of the coatings. The nature of the chemical bonding was examined by XPS, indicating different amounts of sp3carbon bonds. Pin-on-disc tests against 100Cr6 ball-bearing steel balls as counterparts show an excellent wear resistance of a-C and a-C:H DLC coatings on all different steel substrates. These results, demonstrated the applicability of PLD–DLC coatings for wear protection of high precision components in the field of tools and mechanical components.