Diamond-on-Polymer Microelectrode Arrays Fabricated Using a Chemical Release Transfer Process
Diamond-on-Polymer Microelectrode Arrays Fabricated Using a Chemical Release Transfer Process
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DOI：
10.1109/jmems.2011.2159099
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发表时间：
2011-08-01
影响因子：
2.7
通讯作者：
Zorman, Christian A.
中科院分区：
文献类型：
--
作者：
Hess, Allison E.;Sabens, David M.;Zorman, Christian A.
本文报告了聚合物上金刚石微电极阵列的设计、制造和表征。采用“金刚石优先”化学释放转移工艺，将在 > 700 摄氏度的温度下生长的金刚石电极集成到温度敏感的聚降冰片烯基 (PNB) 基板上，从而在柔性设备中利用金刚石有利的神经接口特性。制作了具有两个电极的皮质内探针和具有十个电极的周围神经电极阵列，其面积范围为800至41 000μm(2)。机械测试表明，该结构具有柔性，复合结构具有与裸 PNB 相似的机械特性。电气测试证实，无需退火后步骤即可形成欧姆接触，并确定聚合物上金刚石电极阻抗在 1 kHz 下类似于 1.5 M Omega。
This paper reports the design, fabrication, and characterization of diamond-on-polymer microelectrode arrays. A "diamond-first" chemical release transfer process was implemented to integrate diamond electrodes, grown at temperatures > 700 degrees C, on a temperature-sensitive polynorbornene-based (PNB) substrate, allowing for the advantageous neural interfacing properties of diamond to be utilized in a flexible device. Intracortical probes with two electrodes and peripheral nerve electrode arrays with ten electrodes ranging in area from 800 to 41 000 mu m(2) were fabricated. Mechanical testing showed that the structures were flexible, with the composite structure having mechanical characteristics similar to bare PNB. Electrical testing confirmed that ohmic contacts were formed without a postanneal step and determined a diamond-on-polymer electrode impedance of similar to 1.5 M Omega at 1 kHz.