L10 FePt Films with Optimal (001) Texture on Amorphous SiO2xd/Si Substrates for High-Density Perpendicular Magnetic Recording Media
L10 FePt Films with Optimal (001) Texture on Amorphous SiO2xd/Si Substrates for High-Density Perpendicular Magnetic Recording Media
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DOI：
10.1021/acsanm.9b01192
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发表时间：
2019-09-01
影响因子：
5.9
通讯作者：
Ouyang, Chuenhou
中科院分区：
文献类型：
--
作者：
Chiou, Jin-Yan;Chang, H. W.;Ouyang, Chuenhou
采用多层膜法在氧化硅衬底上制备了具有最高[001]择优取向度的L1（0）FePt薄膜，并对其进行了快速热退火（RTA）。我们确定了如何在非晶衬底上合成择优取向结构，我们发现这对[001]择优取向的最佳形成至关重要。这是通过控制RTA过程的加热速率来实现的。我们还确定了如何影响的光束功率，溅射工作压力，和退火时间的影响FePt薄膜的结构和磁性。例如，通过成分和面内张应力调整，已经获得了FePt膜的L1（0）择优取向和增加的磁各向异性。提高RTA加热速率可以提高垂直场的介电常数，从而提高应变诱导的位错密度。我们还发现FePt L1（0）薄膜中位错的应变场可以作为主要的钉扎位置，限制畴壁运动，增加矫顽力。我们发现，这是由于与位错相关联的应变场的空间范围类似于膜中的畴壁宽度。
Highly ordered L1(0) FePt films with the highest degree of [001] preferred orientation were prepared by multilayer deposition on amorphous oxidized Si substrates and subsequent rapid thermal annealing (RTA). We identify how to synthesize the preferred orientation structure on the amorphous substrate, which we find to be critical to the optimal formation of the [001] preferred orientation. This was achieved by controlling the heating rate of the RTA process. We also identify how the influence of the beam power, sputtering working pressure, and annealing time affect the structural and magnetic properties of FePt films. For example, a L1(0) preferred orientation and increased magnetic anisotropy of the FePt films have been attained by composition and in plane tensile stress adjustments. The perpendicular field coercivity was enhanced by increasing the RTA heating rate, which increased the dislocation densities induced by strain. We also found that the strain fields of dislocations in FePt L1(0) films can act as the dominant pinning sites that restrict domain wall motion, increasing the coercivity. We find that this is due to the spatial range of the strain fields associated with dislocations being similar to the domain wall width in the films.