Crack Resistance of Diamond‐Like Carbon Coatings
Crack Resistance of Diamond‐Like Carbon Coatings
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DOI：
10.1002/vipr.202100769
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发表时间：
2021-12
影响因子：
0.1
通讯作者：
K. Bobzin;T. Brögelmann;M. Carlet;N. Kruppe;M. Engels;M. Arghavani
中科院分区：
文献类型：
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作者：
K. Bobzin;T. Brögelmann;M. Carlet;N. Kruppe;M. Engels;M. Arghavani
本文的目的是研究直流磁控溅射（dcMS）和高功率脉冲磁控溅射（HPPMS）在不同工艺参数下沉积的类金刚石碳（DCL）涂层的抗裂性。为此，使用具有RFN ≤ 1 nN的极高力分辨率的纳米压痕来分析不同的a-C涂层，这些涂层是在工艺气体氩气、氦气和氖气的变化下沉积的。由于压头的力分辨率非常高，因此在每个力-位移曲线中记录了大量的N = 31，872个数据点，这使得能够进行所需的分析。根据结果，可以说纳米压痕能够提供有关DLC涂层裂纹形成的知识。用氖沉积的涂层在弹塑性性质方面显示出更有前途的行为。此外，力-位移曲线的评估表明这些涂层具有更高的抗裂纹形成性。此外，使用Ne和p = 2.0 Pa、p = 1.5 Pa和p = 1.0 Pa的三个压力进行了对工艺气体压力的影响的研究。结果表明，施加适度的气体压力可以产生具有最高韧性的涂层相比，用更高和更低的气体压力沉积的涂层。
The aim of the current paper is the study of the crack resistance of diamond‐like carbon (DCL) coatings deposited by direct current magnetron sputtering (dcMS) and high‐power pulse magnetron sputtering (HPPMS) with different process parameters. For this purpose nanoindentation with a very high force resolution of RFN ≤ 1 nN was used to analyze different a‐C coatings, which were deposited under variation of the process gases argon, helium and neon. Owing to significantly high force resolution of the indenter, a large number N = 31,872 of data points in each force‐displacement curve was recorded, which enabled the desired analyses. Based on the results, it can be stated that the nanoindentation is able to provide knowledge on the crack formation of DLC coatings. The coatings deposited with neon show a more promising behavior in point of elastic‐plastic properties. In addition, the evaluation of the force‐displacement curves indicates a higher resistance to crack formation of these coatings. Furthermore, investigations on the influence of the process gas pressure were conducted using Ne and three pressures p = 2.0 Pa, p = 1.5 Pa and p = 1.0 Pa. The results show that applying the moderate gas pressure can generate coatings with the highest toughness compared to the coatings deposited with higher and lower gas pressures.