Development of a Micropump for Bio-MEMS Using a New Biocompatible Piezoelectric Material MgSiO_3
Development of a Micropump for Bio-MEMS Using a New Biocompatible Piezoelectric Material MgSiO_3
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使用新型生物相容性压电材料MgSiO_3开发生物MEMS微型泵
DOI：
10.1117/1.3624515
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Y.
中科院分区：
文献类型：
--
作者：
Nakamachi;E.;Hwang;H.;Okamoto;N. and Morita;Y.
研制了一种用于药物输送和健康监测的生物医学微机电系统（Bio-MEMS）微泵。首先，我们评估了我们的压电薄膜泵的一个新设计的微流体系统的性能，使用有限元方法。数值计算结果表明，我们的微泵系统的血液测试有足够的输送能力。采用射频磁控溅射法在Cu/Ti/Si（100）衬底上制备了多层MgSiO 3薄膜。对薄膜的晶体取向和压电性能进行了测试，证实MgSiO 3（101）晶体生长良好。使用位移-电压曲线计算应变常数d33为179.4 pm/V。此外，使用微机械加工工艺制造的单态致动器的偏转和本征频率，使用激光多普勒测振仪测量，这表明偏转随施加电压线性增加：它是82.6 nm与施加电压为15 V。我们测量了使用亮度差测量方法的微泵的流量。实验结果表明，在15 V电压下，最大流量为7.1 nl/s，表明所研制的MgSiO 3单晶微泵可以作为一种综合性的生物MEMS器件。
A micropump of biomedical-microelectric mechanical system (Bio-MEMS) for drug delivery systems and health monitoring systems using a new biocompatible piezoelectric thin film was developed. We first assessed the performance of our piezoelectric thin film pump of a newly designed microfluid system using the finite element method. Numerical results show a sufficient transportation ability of our micropump system for blood tests. We generated a multilayer MgSiO3thin film on Cu/Ti/Si (100) substrate using RF-magnetron sputtering. We measured the crystallographic orientation and piezoelectric property of the thin film and confirmed that MgSiO3(101) crystal grew well. The strain constantd33was calculated as 179.4 pm/V using the displacement-voltage curve. Furthermore, the deflection and eigenfrequency of the monomorph-actuator, fabricated using a micromachining process, were measured using the laser Doppler vibrometer, which revealed that the deflection linearly increased with applied voltage: it was 82.6 nm with applied voltage of 15 V. We measured the flow rate of a micropump using the luminance difference measurement method. Results showed that the maximum flow rate was 7.1 nl/s at the applied voltage of 15 V. We concluded that our newly developed MgSiO3monomorphic micropump can be a comprehensive Bio-MEMS device.