Mathematical considerations for evaluating X-ray beam size in micro-XRF analysis
Mathematical considerations for evaluating X-ray beam size in micro-XRF analysis
复制标题
在微型 XRF 分析中评估 X 射线束尺寸的数学考虑
DOI：
10.1002/xrs.3325
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发表时间：
2023
影响因子：
1.2
通讯作者：
Masanori Nakae; Tsugufumi Matsuyama; Hideyuki Ishi; Kouichi Tsuji
中科院分区：
文献类型：
--
作者：
Ogo Akitsu;Okayama Shotaro;Nakatani Masaya;Hashimoto Masahiko;Masanori Nakae; Tsugufumi Matsuyama; Hideyuki Ishi; Kouichi Tsuji
微X射线荧光光谱法（micro-XRF）通过聚焦于初级X射线，用于小区域的元素成像和分析。适当的光束直径评估至关重要，因为它直接关系到显微XRF成像的空间分辨率。X射线束的大小是根据XRF强度相对于扫描距离（细线扫描法）或其微分曲线（刀口扫描法）的实验确定的。然而，光束直径目前没有在数学上适当的方法进行评估，并且已知在某些条件下与实际值显著不同。已经提出了一个公式来纠正这种差异;然而，据我们所知，没有研究讨论的性能的校正公式和条件下，他们可以应用。通过对X射线束和扫描材料之间的重叠体积进行数学分析，我们成功地导出了一个适当的拟合函数，该函数取代了考虑吸收效应的高斯函数。拟合函数对于每种方法都是有效的。该技术用于评价使用多毛细管X射线聚焦光学器件产生的微X射线束。使用不同尺寸的导丝进行细线和刀口扫描，以确定X射线束尺寸。利用新导出的修正公式，可以对由传统拟合函数得到的束流尺寸进行精确修正。使用推导出的拟合函数进行了模拟，并证明了校正公式的适用性。
Micro X‐ray fluorescence spectrometry (micro‐XRF) is conducted for elemental imaging and analysis of small regions, by focusing on primary X‐rays. An appropriate beam diameter evaluation is essential as is directly related to the spatial resolution of micro‐XRF imaging. The X‐ray beam size was experimentally determined from the XRF intensity with respect to the scanning distance (thin‐wire scanning method) or its differentiated curve (knife‐edge scanning method). However, a beam diameter is not currently evaluated in a mathematically appropriate method and is known to differ significantly from the actual value under certain conditions. A formula to correct this difference has been proposed; however, to the best of our knowledge, no study has discussed the performance of the correction formula and conditions under which they can be applied. By mathematically analyzing the overlapping volume between the X‐ray beam and the scanning material, we succeeded in deriving an appropriate fitting function that replaces the Gaussian function taking into account the effect of absorption. The fitting function is effective for each method. This technique was applied to evaluate the micro X‐ray beam created using polycapillary X‐ray focusing optics. Both thin‐wire and knife‐edge scanning methods were used with wires of different sizes to determine the X‐ray beam size. The beam size obtained by the conventional fitting function can be accurately corrected using the newly derived correction formula. Simulations were performed using the derived fitting function, and the applicability of the correction formulas was demonstrated.