Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma
Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma
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DOI：
10.1063/5.0097691
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发表时间：
2022-08
期刊：
影响因子：
1.6
通讯作者：
K. Kamataki;Daiki Nagamatsu;Tao Yang;Kohei Abe;A. Yamamoto;I. Nagao;Toshiaki Arima;M. Otaka;Yuma Yamamoto;D. Yamashita;T. Okumura;Naoto Yamashita;N. Itagaki;K. Koga;M. Shiratani
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作者：
K. Kamataki;Daiki Nagamatsu;Tao Yang;Kohei Abe;A. Yamamoto;I. Nagao;Toshiaki Arima;M. Otaka;Yuma Yamamoto;D. Yamashita;T. Okumura;Naoto Yamashita;N. Itagaki;K. Koga;M. Shiratani
研究了在正硅酸乙酯（TEOS）/O2/Ar等离子体中，调幅（AM）放电方法对纳米颗粒生长的影响以及纳米颗粒生长与等离子体产生的关系。的激光散射（LLS）的强度，这是成比例的密度和六次方的纳米粒子的大小在瑞利散射制度，减少了18%，在AM水平为10%和60%，在AM水平为50%。另一方面，ArI发射强度，这是大致成正比的等离子体密度，是高于连续波放电。因此，AM放电抑制TEOS等离子体中纳米颗粒的生长。我们已经显示了振荡的轴向电场Ez与AM放电的AM频率的电场测量使用电光探针。我们已经讨论了这些波动的Ez主要导致的垂直振荡的悬浮位置被困在等离子体鞘边界区域的纳米粒子考虑到在轴向方向上的力平衡方程对这些负电荷的纳米粒子。
We investigate the effects of the amplitude modulation (AM) discharge method on the growth of nanoparticles and the relation between growth of nanoparticles and plasma generation in tetraethylorthosilicate (TEOS)/O2/Ar plasma. The laser-light scattering (LLS) intensity, which is proportional to the density and the sixth power of the size of nanoparticles in the Rayleigh scattering regime, decreases by 18% at an AM level of 10% and by 60% at an AM level of 50%. On the other hand, the ArI emission intensity, which is roughly proportional to plasma density, is higher than that for the continuous wave discharge. Thus, AM discharges suppress growth of nanoparticles in TEOS plasma. We have shown oscillations of the axial electric field Ez with the AM frequency for AM discharge by electric field measurement using an electro-optic probe. We have discussed that these fluctuations of Ez mainly lead to the vertical oscillation of the levitation position of nanoparticles trapped in the plasma sheath boundary region by taking into account the force balance equation in the axial direction on these negatively charged nanoparticles.