Integration of a step gauge measurement capability at the PTB Nanometer Comparator – concept and preliminary tests
Integration of a step gauge measurement capability at the PTB Nanometer Comparator – concept and preliminary tests
复制标题
在 PTB 纳米比较器上集成阶梯规测量功能 – 概念和初步测试
DOI：
--
复制
发表时间：
2018
期刊：
影响因子：
--
通讯作者：
J. Flügge
中科院分区：
文献类型：
--
作者：
C. Weichert;S. Bütefisch;R. Köning;J. Flügge
为了满足触觉坐标测量机校准日益增加的不确定性需求，PTB旨在提供不确定性在30 nm范围内的校准工件。因此，Nanometer比较仪将升级为触觉传感器系统，以增加测量台阶量规的能力。提出了将触觉传感器集成到机器设置中的概念，并通过重复接触量块面来分析两种不同的传感器。使用基于硅弯曲和两个光纤干涉仪的传感器，实现了小于7 nm的（1 μ m）重复性。
To meet the increasing uncertainty demands for the calibration of tactile coordinate measuring machines the PTB aims to provide calibrated artefacts with an uncertainty in the range of 30 nm. Therefore, the Nanometer Comparator will be upgraded with a tactile sensor system to add the capability to measure step gauges. A concept of the integration of a tactile sensor into the machine setup is presented and two different sensors were analysed by repetitively contacting a gauge block face. With a sensor based on a silicon flexure and two fibre interferometers a (1) repeatability of less than 7 nm was achieved.