Synthesis of molybdenum-doped rhenium disulfide alloy using aerosol-assisted chemical vapour deposition

Synthesis of molybdenum-doped rhenium disulfide alloy using aerosol-assisted chemical vapour deposition
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DOI:
10.1016/j.mssp.2021.105718
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发表时间:
2021-06
影响因子:
4.1
通讯作者:
N. Al-Dulaimi;M. Al-Shakban;E. Lewis;Paul D. McNaughter;F. Alam;S. Haigh;David J. Lewis
N. Al-Dulaimi;M. Al-Shakban;E. Lewis;Paul D. McNaughter;F. Alam;S. Haigh;David J. Lewis
中科院分区:
工程技术3区
文献类型:
--
作者:
N. Al-Dulaimi;M. Al-Shakban;E. Lewis;Paul D. McNaughter;F. Alam;S. Haigh;David J. Lewis

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采用含(1)[Re(S2CC6H5)(S3CC6H5)2]和(2)[Mo(S2CNEt2)4]的前驱体溶液,采用气溶胶辅助化学气相沉积(AACVD)法制备了钼掺杂的二硫化Re(Mo:ReS2)合金多晶薄膜。用粉末X射线衍射仪(p-X射线衍射仪)、拉曼光谱、扫描电子显微镜(SEM)、透射电子显微镜(TEM)、电感耦合等离子体发射光谱(ICPOES)和能量色散X射线(EDX)对合成的薄膜进行了表征。X射线衍射谱表明,层间距随掺杂膜中Mo含量的增加而增大,(001)晶面随掺杂膜中Mo含量的增加而变宽变弱。拉曼分析还发现,随着Mo含量的增加,ReS_2的振动模被破坏,而类银振动模和卵振模发生了明显的位移。用电感耦合等离子体发射光谱仪检测到了稀土基质中钼的存在。结果表明,最终材料中的Mo含量为7.61 at%,而初始喂料为15 at%。掺杂合金薄膜的扫描电子显微镜照片显示了纳米晶的形貌,并且随着Mo含量的增加而转变为ReS2结构。
Polycrystalline thin films of molybdenum-doped rhenium disulphide (Mo-doped ReS2) alloys were synthesised by aerosol-assisted chemical vapour deposition (AACVD) using precursor solutions containing(1)[Re(S2CC6H5)(S3CC6H5)2], and(2)[Mo(S2CNEt2)4]. Synthesised thin films were characterised using powder X-Ray diffraction (p-XRD), Raman spectroscopy, scanning electron microscope (SEM), transmission electron microscope (TEM), inductively coupled plasma-optical emission spectrometry (ICP-OES) and energy dispersive X-Ray (EDX). The p-XRD shows that interlayer spacing increases with increasing Mo content in the ReS2matrix, and (001) plane becomes broad and weak as the molybdenum increases in the doped films. The destruction of the vibrational modes of ReS2on increasing the Mo content and a clear shift in the Egvibrational and Ag-likemodes were also observed by Raman analysis. The presence of Mo in the ReS2matrix was detected by ICP-OES. It was observed that the Mo content in the final material was 7.61 at% compared to the initial feed of 15 at%. The SEM images of the doped alloy films revealed nano crystal morphology, and the morphology changed when there was an increase in the Mo portion into the ReS2crystal structure.