Fabrication and characterization of ITO thin films on heat-resistant transparent flexible clay films
Fabrication and characterization of ITO thin films on heat-resistant transparent flexible clay films
复制标题
耐热透明柔性粘土薄膜上 ITO 薄膜的制备与表征
DOI：
10.1016/j.surfcoat.2007.10.039
复制
发表时间：
2008
影响因子：
5.4
通讯作者：
F. Mizukami
中科院分区：
文献类型：
--
作者：
H. Tetsuka;T. Ebina;T. Tsunoda;H. Nanjo;F. Mizukami
采用射频磁控溅射法在具有耐热性和高阻气性的透明柔性粘土薄膜上制备了透明导电氧化铟锡（ITO）薄膜。这些薄膜的电学，结构和光学性质进行了研究作为沉积温度的函数。当沉积温度高于300 °C时，ITO薄膜的最低电阻率为4.2×10−4Ωcm，在可见光区的平均透过率大于90%。结果表明，采用常规射频磁控溅射法在高温下在透明柔性粘土薄膜上制备的ITO薄膜具有低电阻率和高透明性，这些特性与玻璃基片上沉积的ITO薄膜相当。
Transparent conductive indium tin oxide (ITO) thin films were deposited on transparent flexible clay films with heat resistant and high gas barrier properties by rf magnetron sputtering. The electrical, structural, and optical properties of these films were examined as a function of deposition temperature. A lowest resistivity of 4.2×10−4Ωcm and an average transmittance more than 90% in the visible region were obtained for the ITO thin films fabricated at deposition temperatures more than 300 °C. It was found that ITO thin films with low resistivity and high transparency can be achieved on transparent flexible clay film using conventional rf magnetron sputtering at high temperature, those characteristics are comparable to those of ITO thin films deposited on a glass substrate.
影响因子：
29.4
作者：
Yano, H;Sugiyama, J;Handa, K
通讯作者：
Handa, K