Demonstration of Fine-Pitch High-Resolution X-ray Transition-Edge Sensor Microcalorimeters Optimized for Energies below 1 keV
Demonstration of Fine-Pitch High-Resolution X-ray Transition-Edge Sensor Microcalorimeters Optimized for Energies below 1 keV
复制标题
针对低于 1 keV 的能量进行优化的细间距高分辨率 X 射线跃迁边缘传感器微量热计演示
DOI：
10.1007/s10909-020-02409-2
复制
发表时间：
2020
影响因子：
2
通讯作者：
K. Ryu
中科院分区：
文献类型：
--
作者：
K. Sakai;J. Adams;S. Bandler;S. Beaumont;J. Chervenak;A. Datesman;F. Finkbeiner;R. Kelley;C. Kilbourne;A. Miniussi;F. Porter;J. Sadleir;S. Smith;N. Wakeham;E. Wassell;F. Jaeckel;D. McCammon;M. Eckart;K. Ryu
在本文中，我们报道了x射线过渡边缘传感器（TES）微热量计，优化后在入射x射线的有限能量范围内具有最佳的能量分辨率，例如能量高达$$\approx 0.8\,{\mathrm{keV}}$$≈0.8 keV的能量分辨率为0.3 eV全宽半最大值（FWHM），这是Lynx x射线微热量计子阵列之一所期望的。我们制作的测试阵列在$$50\,\upmu {\mathrm{m}}$$ 50 μ m的间距上具有$$60\times 60$$ 60 × 60传感器，并具有1微米厚的$$46\times 46\,\upmu {\mathrm{m}}^2$$ 46 × 46 μ m 2吸收器。我们利用光纤传输的3 eV光子测量了同一器件的光谱能量分辨率。对于单光子3 eV线，我们获得了0.25 eV FWHM的能量分辨率，这与基于信号大小和噪声的估计性能一致。进一步的测量将确定能量分辨率如何随能量而降低。根据对TES跃迁特性的测量，这种水平的能量分辨率应该可以达到0.5 keV，然后性能将逐渐下降到1.5 keV下约2.3 eV的测量能量分辨率。在本文中，我们描述了这种检测器的完整设计和特性，并讨论了像这样的像素设计的性能限制。
In this paper, we report on X-ray transition-edge sensor (TES) microcalorimeters optimized to have the best possible energy resolution for a limited energy range for the incoming X-rays, such as an energy resolution of 0.3 eV full width half maximum (FWHM) for energies up to $$\approx 0.8\,{\mathrm{keV}}$$ ≈ 0.8 keV as is desirable for one of the Lynx X-ray Microcalorimeter subarrays. The test array we have fabricated has $$60\times 60$$ 60 × 60 sensors on a pitch of $$50\,\upmu {\mathrm{m}}$$ 50 μ m , and has $$46\times 46\,\upmu {\mathrm{m}}^2$$ 46 × 46 μ m 2 absorbers that are one micrometer thick. We have measured a spectral energy resolution of the same device using 3 eV photons delivered through an optical fiber. For the one-photon 3 eV line, we have obtained an energy resolution of 0.25 eV FWHM, which is consistent with the estimated performance based on the signal size and noise. Further measurements will determine how the energy resolution degrades with energy. Based upon measurements of the TES transition characteristics, it appears that this level of energy resolution should be achievable up to 0.5 keV, and the performance will then gradually degrade to the measured energy resolution of around 2.3 eV at 1.5 keV. In this paper, we describe the full design and characterization of this detector, and discuss the performance limits of pixels designs like this.