Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone
Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone
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DOI：
10.1016/j.mejo.2007.09.008
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发表时间：
2007-10-01
影响因子：
2.2
通讯作者：
Qiao, Hui
中科院分区：
文献类型：
--
作者：
Xue, Chenyang;Chen, Shang;Qiao, Hui
根据鱼侧线器官的听觉原理，介绍了一种用于获取水下声场矢量信息的微机电系统仿生矢量水听器。希望利用基于mems的压阻效应和仿生结构可以提高矢量水听器的低频灵敏度和小型化。该仿生结构由两部分组成：高精度四梁微结构和固定在微结构中心的刚性塑料圆柱体。将位于梁上的压敏电阻模拟为侧线毛细胞，将刚性塑料圆柱体模拟为立体纤毛。当塑料圆柱体受到声音刺激时，压敏电阻通过惠斯通电桥电路将产生的应变转换成差分电压输出信号。采用微细加工技术制备了微结构，并给出了测量结果。实验结果表明，该水听器的接收灵敏度为-197.7 dB （0 dB =1 V/mu Pa）。该新型水听器不仅具有良好的方向图和微型化结构，而且具有良好的低频特性，能够满足低频声学测量的要求。(c) 2007 Elsevier Ltd.版权所有。
According to the auditory principle of fish's lateral line organ, a novel microelectromechanical systems (MEMS) bionic vector hydrophone used for obtaining vector information of underwater sound field is introduced in this paper. It is desirable that the application of MEMS-based piezoresistive effect and bionics structure may improve the low-frequency sensitivity of the vector hydrophone as well as its miniaturization. The bionic structure consists of two parts: high-precision four-beam microstructure and rigid plastic cylinder which is fixed at the center of the microstructure. The piezoresistor located at the beam is simulated to the hair cell of lateral line and the rigid plastic cylinder is simulated to stereocilia. When the plastic cylinder is stimulated by sound, the piezoresistor transforms the resultant strain into a differential voltage output signal via the Wheatstone bridge circuit. Microfabrication technology has been employed for the fabrication of the microstructure and measurement results are given. The experiment results show that the receiving sensitivity of the hydrophone is -197.7 dB (0 dB =1 V/mu Pa). The novel hydrophone not only possesses satisfactory directional pattern as well as miniature structure, but also has good low-frequency characteristics, and satisfies the requirements for low-frequency acoustic measurement. (c) 2007 Elsevier Ltd. All rights reserved.