An Ultra-Thin Piezoresistive Stress Sensor for Measurement of Tooth Orthodontic Force in Invisible Aligners
An Ultra-Thin Piezoresistive Stress Sensor for Measurement of Tooth Orthodontic Force in Invisible Aligners
复制标题
用于测量隐形矫正器牙齿正畸力的超薄压阻式应力传感器
DOI：
10.1109/jsen.2011.2166065
复制
发表时间：
2012-05-01
影响因子：
4.3
通讯作者：
Wang, Zheyao
中科院分区：
文献类型：
--
作者：
Shi, Yun;Ren, Chaochao;Wang, Zheyao
研制了一种硅压阻式应力传感器，用于测量隐形矫正器中牙齿正畸力的三个分量。应力传感器芯片由多个压阻花环组成，固定在牙齿表面，测量正畸力诱导的应力。建立了一种反问题算法，根据测量的应力重建牙齿的正畸力。一种关键的减薄工艺是利用化学机械抛光将传感器芯片减薄到650到100，这样它就可以容纳到矫正器和牙齿之间的有限空间，而不会对正畸力产生太大影响。超薄的厚度使传感器芯片能够顺应牙齿变形，并将应力测量灵敏度提高40倍，使其能够测量微小的正畸力。详细介绍了传感器的设计、制作、正畸应力测量和力重建，实验结果证明了利用小型化、超薄传感器测定体外正畸力的可行性。
A silicon piezoresistive stress sensor is developed to measure the three components of the orthodontic forces of a tooth in invisible aligners. The stress sensor chip consists of multiple piezoresistor rosettes, and is fixed on the tooth surface to measure the orthodontic force induced stresses. An inverse problem algorithm is established to reconstruct the orthodontic forces of the tooth from the measured stresses. A key thinning process is developed using chemical-mechanical polishing to thin the sensor chip from 650 to 100 , such that it can be accommodated to the limited space between the aligner and the tooth, without much influence on the orthodontic force. The ultra-thin thickness enables the sensor chip to be compliance with tooth deformation, and improves the stress measurement sensitivity as much as 40 times, making it capable of measuring small orthodontic force. The sensor design, fabrication, orthodontic stress measurement, and force reconstruction are given in details, and the experimental results demonstrate the feasibility of using miniaturized and ultra-thin sensors to determine the in vitro orthodontic forces.