Challenges in quantitative crystallographic characterization of 3D thin films by ACOM-TEM
Challenges in quantitative crystallographic characterization of 3D thin films by ACOM-TEM
复制标题
DOI：
10.1016/j.ultramic.2016.07.007
复制
发表时间：
2017-02-01
期刊：
影响因子：
2.2
通讯作者：
Kuebel, C.
中科院分区：
文献类型：
--
作者：
Kobler, A.;Kuebel, C.
用于透射电子显微镜（ACOM-TEM）的自动晶体取向映射已经成为一种易于使用的研究晶体材料的方法，并且通过在大面积上添加局部晶体学信息来补充其他TEM方法。它填补了高分辨率电子显微镜和电子背散射衍射在空间分辨率方面的空白。近年来的研究表明，光斑衍射ACOM-TEM是一种定量分析样品晶粒尺寸、孪晶密度、取向密度等参数的方法。它甚至可以与现场拉伸或热测试结合使用。然而，目前的方法也有局限性。在本文中，我们讨论了一些挑战并讨论了解决方案，例如，我们提出了一个模糊过滤器，它可以减少具有“180度模糊问题”的像素数量。为此，获得并分析了具有重叠晶的纳米晶钯薄膜的ACOM-TEM倾斜序列。(C) 2017年Elsevier B.V.出版
Automated crystal orientation mapping for transmission electron microscopy (ACOM-TEM) has become an easy to use method for the investigation of crystalline materials and complements other TEM methods by adding local crystallographic information over large areas. It fills the gap between high resolution electron microscopy and electron back scatter diffraction in terms of spatial resolution. Recent investigations showed that spot diffraction ACOM-TEM is a quantitative method with respect to sample parameters like grain size, twin density, orientation density and others. It can even be used in combination with in-situ tensile or thermal testing. However, there are limitations of the current method. In this paper we discuss some of the challenges and discuss solutions, e.g. we present an ambiguity filter that reduces the number of pixels with a '180 degrees ambiguity problem'. For that an ACOM-TEM tilt series of nanocrystalline Pd thin films with overlapping crystallites was acquired and analyzed. (C) 2017 Published by Elsevier B.V.