Pneumatic two-dimensional conveyance system for autonomous distributed MEMS
Pneumatic two-dimensional conveyance system for autonomous distributed MEMS
复制标题
用于自主分布式MEMS的气动二维输送系统
DOI：
10.1109/sensor.2003.1216941
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
Y. Fukuta;Y. Mita;M. Arai;H. Fujita
提出了一种基于自主分布式微机电系统的微传输系统。并提出了一种适用于本系统的控制方法。为了实现该系统的传输部分，我们采用本体微加工技术开发了一组气流微致动器。在气流（17 kPa）的帮助下，展示了小物体（2.1 mm/spl次/4.1 mm，约4 mg重量）的一维输送。实现了一个由560个微致动器组成的二维系统，该系统位于35mm /spl次/ 35mm区域内。几乎所有的致动器都是由静电力驱动的。我们已经实现了物体的悬浮运动和转移运动，但完全控制二维传输仍在试验中。我们还采用0.8 /spl mu/m规则的CMOS制造工艺开发了由一系列传感器和处理器组成的集成电路。该电路作为一个分布式处理系统来识别微物体的形状。目前的执行器阵列与控制电路的组装正在进行中。
We have proposed a micro conveyance system, which is based on the autonomous distributed MEMS. A controlling method suitable for our system has also been proposed. To realize a conveyance part of the system, we have developed an array of air-flow micro actuator by bulk micromachining technology. One-dimensional conveyance of a small object (2.1 mm/spl times/4.1 mm, approximately 4 mg weigh) was demonstrated with the help of the air-flow (17 kPa). A two-dimensional system composed of 560 micro actuators in a 35 mm/spl times/35 mm area was realized. Almost all the actuators were successfully driven by electrostatic force. We have achieve levitation-motion and transfer-motion of the object nevertheless full control of two-dimensional conveyance is under trial. We have also developed an integrated circuit composed of an array of sensors and processors by 0.8 /spl mu/m-rule CMOS fabrication process. The circuit works as a distributed processing system to recognize a shape of a micro object. Assembling of the present actuator array with control circuits is in progress.