Architecture combination by micro photoforming process
Architecture combination by micro photoforming process
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通过微光成型工艺进行架构组合
DOI：
10.1109/memsys.1994.555625
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
N. Nakajima
中科院分区：
文献类型：
--
作者：
Tarou Takagi;N. Nakajima
“光成形”和“光制造”是使用液体树脂的光化学固化的塑料成形方法的名称。光固化快速成型技术是快速成型制造领域中的一种方法。提出了光成形技术在微机械制造中的应用，并以MEMS’93（1993）为例，给出了获得更高成形精度的理论和实验指导。在本研究中，我们提出了“组合结构”和“胶合机构”的新概念，“胶合机构”是指通过组合构件来制造复杂结构的方法，每个构件都是由其最佳制造工艺制成的，并且它们通过接合机构相互连接。这种连接机构被命名为“胶接机构”，第二个字。使用组合架构的制造将非常有效地制造具有给定功能要求的微机械，但是除了光成形之外，没有微机械加工工艺来制造如此复杂的胶合机构。我们还做了一些实验，使一个结构，使用组合架构，以验证是否真的有潜力的光成型实现架构组合，我们结合表面加工和光成型，以消除彼此的弱点，并给予良好的驱动特性和最佳形状的功能，作为一种工具的实用性。
"Photoforming" and "photofabrication" are the names for a plastic forming method using photochemical solidification of liquid resins. One of this method is well known as the stereolithography in the field of rapid prototyping and manufacturing (RP/M). We have suggested an application of photoforming to micromachine fabrication, and showed some guidelines to get finer forming precision with detail theories and experiments on MEMS '93 (1993). In this study, we proposed new concepts of "combined architecture" and "glue mechanism" The first word means a way to fabricate complicated structures by combining components, each of them is made by its best fabrication process and they are connected each other by joint mechanisms. This joint mechanism is named "glue mechanism", the second word. Fabrication using combined architecture will be very effective to make micromachines with given functional requirements, but there is no micromachining process to make such a complex glue mechanism, except photoforming. Also we did some experiments to make a structure using combined architecture to verify if photoforming really has the potential to realize the architecture combination, We combined surface machining and photoforming to cancel their weak-points each other, and to give good actuation characteristics and-the best shape for their functions as a tool of utility.