A novel single shot interferometry with a wide field of view by reference plates coated with various metals
A novel single shot interferometry with a wide field of view by reference plates coated with various metals
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DOI：
10.1016/j.precisioneng.2018.01.015
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发表时间：
2018-04
影响因子：
3.6
通讯作者：
Yuta Ohara;Yosuke Tsukiyama;I. Nitta
中科院分区：
文献类型：
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作者：
Yuta Ohara;Yosuke Tsukiyama;I. Nitta
我们在以前的研究中开发的宽视场激光显微镜使我们能够在很短的时间内观察到圆柱体的整个表面。在这项研究中，牺牲了激光显微镜在深度方向上的分辨率，以获得大视场。为了克服这一缺点，实现对各种物体三维轮廓的纳米级测量，我们将双光束干涉法引入到大视场激光显微镜中。为了获得高对比度的干涉条纹图案，在玻璃参考板上涂覆一层薄的铬膜或其他纯金属。干涉条纹由正弦波变形为锯齿状。干涉条纹的失真似乎与被测样品表面的倾斜度相对应。这表明了实现一种新的单次激发干涉测量方法的可能性，该方法能够在不使用相移法的情况下仅根据干涉条纹图案的一幅图像来确定表面轮廓。每种金属的强度分布的扭曲类型是不同的。从傅里叶变换分析和电磁方法两方面讨论了干涉条纹强度分布变为锯齿形的机理。
A laser microscope with a wide field of view developed in our previous study allowed us to observe the whole surface of a cylinder in a very short time. In that study, resolution of the laser microscope in the depth direction was sacrificed to obtain a wide field of view. To overcome this shortcoming and achieve nano-level measurement of 3-dimensional profiles of various objects, we have introduced two-beam interferometry to the wide field of view laser microscope. To achieve a high contrast interference fringe pattern, a glass reference plate was coated with a thin Cr film or other pure metals. The interference fringe pattern was distorted from sinusoidal wave into a sawtooth-like waveform. The distortion of the interference fringe pattern appeared to correspond to the inclination of the specimen surface measured. This shows the possibility of realizing a novel single shot interferometry method capable of determining the surface profile from only one image of the interference fringe pattern without using the phase shift method. The type of distortion of intensity distribution was different for each metal. The mechanisms by which the intensity distribution of the interference fringes changed to sawtooth pattern are discussed from both a Fourier-transform analysis and an electromagnetic approach.