Comment on “The multilayer-modified Stoney’s formula for laminated polymer composites on a silicon substrate” [J. Appl. Phys. 86, 5474 (1999)]
Comment on “The multilayer-modified Stoney’s formula for laminated polymer composites on a silicon substrate” [J. Appl. Phys. 86, 5474 (1999)]
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对“硅基底上层压聚合物复合材料的多层改性斯托尼公式”的评论 [J. Phys. 86, 5474 (1999)]
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
C. Klein
中科院分区：
文献类型：
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作者：
C. Klein
有大量文献涉及多层层合板热循环引起的应变、应力和曲率，但大部分已发表的工作未能提供适用公式的正确推导。例如，Kim等人最近提出了[J.Appl.Phys.86，5474（1999）]一个公式--多层修正的Stoney公式--用于估计由安装在厚衬底上的薄膜组成的结构的弯曲，他们基于实验数据验证了该公式。在此通信中，它表明，该公式可以来自现有的封闭形式的解决方案的弹性各向同性的多层层合板的曲率，并没有概念上的联系与Stoney的公式。
There is a vast amount of literature dealing with the strains, the stresses, and the curvature induced by thermal cycling of multilayered laminates, but much of the published work fails to provide proper derivations of the applicable formulas. For example, Kim et al. recently proposed [J. Appl. Phys. 86, 5474 (1999)] a formula — the multilayer-modified Stoney’s formula — for estimating the bow of structures consisting of thin films mounted on a thick substrate, which they validate on the basis of experimental data. In this communication, it is shown that the formula can be derived from available closed-form solutions for the curvature of elastically isotropic multilayer laminates and has no conceptual connection with Stoney’s formula.