Harnessing Anisotropic Nanoposts to Enhance Long-Range Orientation Order of Directed Self-Assembly Nanostructures via Large Cell Simulations.
Harnessing Anisotropic Nanoposts to Enhance Long-Range Orientation Order of Directed Self-Assembly Nanostructures via Large Cell Simulations.
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DOI：
10.1021/mz5003257
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发表时间：
2014-07
影响因子：
5.8
通讯作者：
Liangshun Zhang;Liquan Wang;Jiaping Lin
中科院分区：
文献类型：
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作者：
Liangshun Zhang;Liquan Wang;Jiaping Lin
采用自洽场理论的大单元模拟方法研究了嵌段共聚物在各向异性椭圆纳米柱阵列引导下的自组装行为。使用椭圆纳米柱的策略允许我们通过抑制圆柱体对齐的其他选择来生成具有单一取向的长程有序圆柱体。纳米柱的各向异性在提高纳米柱晶格尺寸和圆柱周期之间的可互换性条件的容限方面起着重要作用。此外，局部缺陷结构可以通过改变椭圆纳米柱的间距和取向来调节。这一工作可为形貌模板的设计提供指导，并为嵌段共聚物光刻制备有序纳米结构奠定基础。
Self-assembly behaviors of cylinder-forming diblock copolymers directed by an array of anisotropic nanoposts with elliptical shape are explored by large cell simulations of self-consistent field theory. The strategy using elliptical nanoposts allows us to generate long-range order cylinders with single orientation by suppressing other selections of cylinder alignment. The anisotropy of nanoposts plays a significant role in improving the tolerance of commensurability conditions between the dimensions of nanopost lattices and the period of cylinders. Moreover, the local defect structures could be regulated through varying the spacing and orientation of elliptical nanoposts. This work may provide useful guidelines for designing the topographical templates and lay the groundwork for fabricating well-ordered nanostructures of block copolymer lithography.