Microwave-excited atmospheric-pressure microplasmas based on a coaxial transmission line resonator
Microwave-excited atmospheric-pressure microplasmas based on a coaxial transmission line resonator
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DOI：
10.1088/0963-0252/18/2/025029
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发表时间：
2009-05-01
影响因子：
3.8
通讯作者：
Cho, M. H.
中科院分区：
文献类型：
--
作者：
Choi, J.;Iza, F.;Cho, M. H.
我们报告了两种基于同轴传输线谐振器（CTLR）的微波激发微等离子体源的设计、制造和表征。该源能够在900 MHz和2.45 GHz下产生类似于10（6）V m（-1）的电场。这些装置可以在包括大气压在内的宽压力范围内自燃氦或氩放电。对大气开放的氩气放电中的气体温度类似于400 K。使用空气作为电介质，工作气体可以通过CTLR，从而形成适合于表面处理的等离子体射流。根据所使用的气体，将输入功率传递到等离子体中的装置效率为50-85%。在器械中未观察到热损伤或电极侵蚀。
We report the design, fabrication and characterization of two microwave-excited microplasma sources based on coaxial transmission line resonators (CTLR). The sources are capable of generating electric fields of similar to 10(6) V m(-1) at 900 MHz and 2.45 GHz. These devices can self-ignite helium or argon discharges in a wide pressure range including atmospheric pressure. The gas temperature in an argon discharge open to atmospheric air is similar to 400 K. Using air as a dielectric, the working gases can be passed through the CTLR, resulting in the formation of plasma jets suitable for surface treatments. The device efficiency on transferring the input power into the plasma is 50-85% depending on the gas used. No thermal damage or electrode erosion has been observed in the devices.