A low-noise sub-500µW lorentz force based integrated magnetic field sensing system

A low-noise sub-500µW lorentz force based integrated magnetic field sensing system
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DOI：
10.1109/memsys.2015.7051113
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发表时间：
2015-03
期刊：
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
影响因子：
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通讯作者：
S. Brenna;P. Minotti;A. Bonfanti;G. Laghi;G. Langfelder;A. Longoni;A. Lacaita
S. Brenna;P. Minotti;A. Bonfanti;G. Laghi;G. Langfelder;A. Longoni;A. Lacaita
中科院分区：
其他
文献类型：
--
作者：
S. Brenna;P. Minotti;A. Bonfanti;G. Laghi;G. Langfelder;A. Longoni;A. Lacaita

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This paper shows, for the first time, a complete magnetic field sensing system including a Lorentz-force sensor operating out of resonance coupled to an integrated circuit for sensing and actuating the device. Working out of resonance, the trade-off between maximum sensing bandwidth and minimum detectable magnetic field is overwhelmed, improving the resolution and enlarging the bandwidth. However, the reduction of signal amplitude makes the readout electronics a critical block. Measurements carried-out on the whole system show an achievable resolution of 180 nT·mA/√Hz over a 150-Hz bandwidth and an overall power consumption of 460 μW. The integrated readout circuit low-noise performance does not limit the resolution, which is set by the MEMS thermomechanical noise.