Extreme UV measurements of a varied line-space Hitachi reflection grating: efficiency and scattering.
Extreme UV measurements of a varied line-space Hitachi reflection grating: efficiency and scattering.
复制标题
不同线空间日立反射光栅的极端紫外线测量：效率和散射。
作者：
J. Edelstein;M. Hettrick;S. Mrowka;P. Jelinsky;C. Martin
第一极端紫外测量的光栅机械与光栅常数的平滑变化。光栅特性进行了总结，并显示和描述了测试装置的示意图。给出了获得绝对光栅效率的步骤。作为68，170，256，304，584和1216 A波长的函数的效率的结果进行了报告和讨论。效率的测量也作为一个功能的位置在整个规定的宽度在256和87度的入射角，并对结果进行了讨论。通过计算机采集衍射图像轮廓进行散射测量报告。
The first extreme UV measurements of a grating mechanically ruled with smooth variations in the grating constant are presented. The grating characteristics are summarized and a schematic of the testing apparatus is shown and described. The procedure for obtaining the absolute grating efficiency is given. The results for that efficiency as a function of wavelengths of 68, 170, 256, 304, 584, and 1216 A are reported and discussed. Efficiency measurements were also made as a function of position across the ruled width at 256 A and 87 deg incident angle, and the results are discussed. Scattering measurements performed via computer acquisition of diffracted image profiles are reported.