Design and fabrication of annular arrays for high-frequency ultrasound
Design and fabrication of annular arrays for high-frequency ultrasound
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DOI：
10.1109/tuffc.2004.1324405
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发表时间：
2004-08-01
影响因子：
3.6
通讯作者：
Lockwood, GR
中科院分区：
文献类型：
--
作者：
Brown, JA;Démoré, CEM;Lockwood, GR
小型高频环形阵列的设计，制造和性能进行了说明。制作并测试了一个50 MHz、直径2 mm、7单元等面积环形阵。使用光刻法定义阵列元件，并使用超声引线键合制作电接触。所得到的换能器产生的脉冲具有52%的-6 dB带宽和-16 dB的插入损耗。通过扫描玻璃纤维尖端上方的换能器阵列来收集辐射图案。在f/2处发现75微米的-6 dB双向波束宽度。辐射图在550微米的距离处平滑地减小到小于-60 dB。
The design, fabrication, and performance of miniature high-frequency annular arrays are described. A 50-MHz, 2-mm-diameter, 7-element, equal-area annular array was fabricated and tested. The array elements were defined using photolithography and the electrical contacts were made using ultrasonic wire bonding. The resulting transducer produced pulses with a -6 dB bandwidth of 52% and an insertion loss of -16 dB. A radiation pattern was collected by scanning the transducer array above the tip of a glass fiber. A -6 dB two-way beam width of 75 microns was found at f/2. The radiation pattern decreased smoothly to less than -60 dB at a distance of 550 microns.