Supercritical CO2 extraction of porogen phase:: An alternative route to nanoporous dielectrics
Supercritical CO2 extraction of porogen phase:: An alternative route to nanoporous dielectrics
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DOI：
10.1557/jmr.2004.0413
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发表时间：
2004-11-01
影响因子：
2.7
通讯作者：
Toney, MF
中科院分区：
文献类型：
--
作者：
Lubguban, JA;Gangopadhyay, S;Toney, MF
提出了一种超临界CO2（SCCO2）制备纳米多孔有机硅薄膜的方法。通过SCCO2从纳米杂化膜中提取牺牲聚（丙二醇）（PPG）产生多孔结构，其中PPG致孔剂的纳米级域被截留在交联聚（甲基倍半硅氧烷）（PMSSQ）基质中。作为比较，评价了通过通常的热分解（在约450 ℃下）和通过SCCO2工艺对于25和55wt%致孔剂负载产生的多孔结构。发现SCCO2工艺在相对较低的温度（
We present a supercritical CO2 (SCCO2) process for the preparation of nanoporous organosilicate thin films for ultralow dielectric constant materials. The porous structure was generated by SCCO2 extraction of a sacrificial poly(propylene glycol) (PPG) from a nanohybrid film, where the nanoscopic domains of PPG porogen are entrapped within the crosslinked poly(methylsilsesquioxane) (PMSSQ) matrix. As a comparison, porous structures generated by both the usual thermal decomposition (at approximately 450 degreesC and by a SCCO2 process for 25 and 55 wt% porogen loadings were evaluated. It is found that the SCCO2 process is effective in removing the porogen phase at relatively low temperatures (