Spatially resolved absolute densities of reactive species and positive ion flux in He-O 2 RF-driven atmospheric pressure plasma jet: touching and non-touching with dielectric substrate
Spatially resolved absolute densities of reactive species and positive ion flux in He-O 2 RF-driven atmospheric pressure plasma jet: touching and non-touching with dielectric substrate
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He-O 2 射频驱动大气压等离子体射流中活性物质和正离子通量的空间分辨绝对密度：与介电基板接触和非接触
DOI：
10.1088/1361-6463/ab813d
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
Bruggeman, Peter J.
中科院分区：
文献类型：
--
作者：
Jiang, Jingkai;Bruggeman, Peter J.
大气压等离子体射流（APPJ）在许多应用中与介电基板直接接触地操作。尽管如此，许多研究一直集中在自由射流。在这封信中，我们报告的空间分辨测量的活性物种，包括中性和离子物种在He+1%O 2 RF驱动的APPJ分子束质谱配备了介电采样板，使检测物种密度APPJ远程操作或直接接触基板。O、O2（a1 Δ g）和O3的空间分辨分布主要受对流控制，并且在接触和非接触条件下的差异最小。
Atmospheric pressure plasma jets (APPJs) are operating in direct contact with dielectric substrates for many applications. Nonetheless, many studies have been focusing on free jets. In this letter, we report spatially resolved measurements of reactive species including neutral and ionic species in an He+ 1% O 2 RF-driven APPJ by molecular beam mass spectrometry equipped with a dielectric sampling plate, enabling to detect species densities for APPJ operating remotely or in direct contact with a substrate. The spatially resolved distribution of O, O 2 (a 1 Δ g) and O 3 is dominated by convection and, remarkably, shows minimum differences between touching and non-touching conditions.