Microfabrication technology applicable to three-dimentional surfaces by masking process and micro slurry-jet process
Microfabrication technology applicable to three-dimentional surfaces by masking process and micro slurry-jet process
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适用于三维表面的掩模工艺和微浆料喷射工艺的微细加工技术
DOI:
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Yoshitaka Nakanishi
中科院分区:
文献类型:
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作者:
Yutaro Doi;Ryota Tashiro;Yuta Nakashima;Yoshitaka Nakanishi