High-Performance Zinc Oxide Transistors and Circuits Fabricated by Spray Pyrolysis in Ambient Atmosphere
High-Performance Zinc Oxide Transistors and Circuits Fabricated by Spray Pyrolysis in Ambient Atmosphere
复制标题
DOI：
10.1002/adma.200803584
复制
发表时间：
2009-06-05
影响因子：
29.4
通讯作者：
Anthopoulos, Thomas D.
中科院分区：
文献类型：
--
作者：
Bashir, Aneeqa;Woebkenberg, Paul H.;Anthopoulos, Thomas D.
使用一个简单的沉积技术，即喷雾热解，用于制造高迁移率，低电压的ZnO晶体管和简单的集成电路被证明。该方法与大面积沉积兼容，并且可以潜在地解决制造成本和高操作电压的问题。
The use of a simple deposition technique, namely spray pyrolysis, for the fabrication of high-mobility, low-voltage ZnO transistors and simple integrated circuits is demonstrated. The method is compatible with large-area deposition and could potentially address both the issue of manufacturing cost and high operating voltages.