Simulation of the Bosch process with a string-cell hybrid method
Simulation of the Bosch process with a string-cell hybrid method
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DOI：
10.1088/0960-1317/14/7/003
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发表时间：
2004-07
影响因子：
2.3
通讯作者：
R. Zhou;Haixia Zhang;Y. Hao;Yangyuan Wang
中科院分区：
文献类型：
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作者：
R. Zhou;Haixia Zhang;Y. Hao;Yangyuan Wang
本文提出了一种新的二维（2D）仿真器，可以模拟无限槽内博世工艺的蚀刻聚合交替过程。建立了蚀刻和沉积的物理模型。利用这些模型和基于串结构和单元结构的串-单元混合方法，该仿真器能够模拟不同材料类型的蚀刻。从实验中提取模型参数后，利用该仿真器模拟了Bosch工艺中侧壁扇形的形成与调整、刻蚀剖面的控制等现象。将仿真结果与实验结果进行了比较，结果吻合较好。
This paper presents a new two-dimensional (2D) simulator, which can simulate the etching polymerization alternation in the Bosch process for an infinite trench. Physical models for etching and deposition are developed. Having been implemented with these models and a string–cell hybrid method based on string structure and cell structure, this simulator has the ability to simulate the etching of different material types. After model parameter extraction from experiments, this simulator is used to simulate several phenomena in the Bosch process, including the formation and adjustment of sidewall scallops and the profile control of trench etching. The simulation results are compared with experiments and a good match can be found.