A robust micro conveyer realized by arrayed polyimide joint actuators
A robust micro conveyer realized by arrayed polyimide joint actuators
复制标题
由阵列聚酰亚胺关节执行器实现的坚固的微型输送机
DOI：
10.1109/memsys.1999.746892
复制
发表时间：
1999
期刊：
影响因子：
--
通讯作者：
G. Stemme
中科院分区：
文献类型：
--
作者：
T. Ebefors;J.U. Mattsson;E. Kalvesten;G. Stemme
研制并研究了一种基于柔性硅腿阵列的新型微运动系统（微输送机）。运动是通过使用电加热聚酰亚胺关节致动器的热致动来实现的。在毫米范围内进行了具有高负载能力的移动平面物体的成功实验。输送机由一个15/spl × 5 mm/sup / 2的芯片组成，12个硅支腿，每个长500 /spl mu/m。结构承受的最大荷载为2000毫克。输送速度最高可达12mm /s。加速寿命测量证明了执行器的长期稳定性。在超过2/ sp1次/10/sup / 8次负载循环后，聚酰亚胺关节执行器的功能不受影响。
A new micro motion system (micro-conveyer) based on arrays of movable robust silicon legs has been developed and investigated. The motion is achieved by thermal actuation of polyimide joint actuators using electrical heating. Successful experiments on moving flat objects in the millimeter range with high load capacity have been performed. The conveyer consists of a 15/spl times/5 mm/sup 2/ chip with 12 silicon legs each 500 /spl mu/m long. The maximum load conveyed on the structure was 2000 mg. Conveyance velocities up to 12 mm/s have been measured. Accelerated lifetime measurements demonstrate the long-term stability of the actuators. The function of the polyimide joint actuators is unaffected after more than 2/spl times/10/sup 8/ load cycles.