On-Machine Measurement of Aspherical Surface Profile
On-Machine Measurement of Aspherical Surface Profile
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发表时间：
2004
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通讯作者：
Kuriyagawa Tsunemoto
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作者：
Kuriyagawa Tsunemoto
本文介绍了在超精密磨床上用误差分离技术精确测量非球面透镜的面形。首先，它是验证的两个探针的方法，这是以前开发的分离的表面轮廓和扫描误差在机器上测量的平面轮廓，不能直接用于非球面表面，因为大的测量误差与探头的对准。一个测量模型，然后开发解决这个问题。在该模型中，扫描误差是精确测量的双探头方法，它采用两个探头（探头A和探头B）扫描一个平面。另一个探头（探头C）用于扫描非球面表面。然后从测头C的输出中提取扫描误差，得到非球面的精确轮廓。在扫描误差的测量中，还应用了双探针法的数据处理技术。在市售超精密磨床上进行了扫描误差测量和非球面轮廓测量实验。
This paper describes accurate surface profile measurement of an aspherical lens on an ultra-precision grinding machine using the error separation technique. At first, it is verified that the two-probe method, which has been previously developed for separation of the surface profile and the scanning error in on-machine measurement of flat surface profiles, cannot be directly employed for aspherical surfaces because of the large measurement error associated with the alignment of the probes. A measurement model is then developed for solving this problem. In the model, the scanning error is accurately measured by the two-probe method, which employs two probes (Probes A and Probes B) to scan a flat surface. Another probe (Probe C) is employed to scan the aspherical surface. The accurate profile of the aspherical surface can then be obtained through extracting the scanning error from the output of Probe C. A technique in data processing of the two-probe method is also applied to the measurement of the scanning error. Experiments of scanning error measurement and aspherical profile measurement are conducted on a commercially available ultra-precision grinding machine.