Effect of the Shape of Nanometer-scaled Patterns on Sapphire Substrate on the Efficiency of Light Emitting Diode
Effect of the Shape of Nanometer-scaled Patterns on Sapphire Substrate on the Efficiency of Light Emitting Diode
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DOI：
10.2494/photopolymer.28.541
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发表时间：
2015-05
影响因子：
0.8
通讯作者：
J. Cho;Heon Lee
中科院分区：
文献类型：
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作者：
J. Cho;Heon Lee
在这项研究中，使用纳米压印光刻（NIL）和电感耦合等离子体蚀刻制造了2英寸大小的高周期性纳米级图案化蓝宝石衬底（NPSS），以提高GaN基发光二极管（LED）的光提取效率。在蓝宝石基板上制作截锥体和圆锥体形状的图案，以比较根据蓝宝石图案的形状对LED的光提取效率的增强效果。在两种不同的 NPSS 上生长蓝色 LED 结构，并测量光致发光 (PL) 和电致发光 (EL)，以确认蓝宝石上两种不同纳米级图案的有效性。当应用 NPSS 时，观察到发光效率的提高；测得的 PL 强度比生长在未图案化蓝宝石基板上的 LED 结构强 2 倍，EL 强度强 2 倍。这些结果表明，高度周期性的纳米级图案会产生多光子散射，并有效提高 LED 的光提取效率。
In this study, a 2 inch sized a highly periodic nanometer-scaled patterned sapphire substrate (NPSS) was fabricated using nanoimprint lithography (NIL) and inductively coupled plasma etching to improve the light-extraction efficiency of GaN-based lightemitting diodes (LEDs). Both truncated cone and cone shape patterns were fabricated on the sapphire substrate to compare the enhancement effect of light extraction efficiency of LEDs according to the shape of sapphire patterns. A blue LED structure was grown on the two different NPSS, and the photoluminescence (PL) and electroluminescence (EL) were measured to confirm the effectiveness of the two different nanometer-scaled patterns on sapphire. An improvement in luminescence efficiency was observed when NPSS was applied; 2 times stronger PL intensity and 2 times stronger EL intensity than the LED structure grown on the un-patterned sapphire substrate was measured. These results show highly periodic nanometer-scaled patterns create multi-photon scattering and effectively enhance the light-extraction efficiency of LEDs.