An analytical model considering the fringing fields for calculating the pull-in voltage of micro curled cantilever beams
An analytical model considering the fringing fields for calculating the pull-in voltage of micro curled cantilever beams
复制标题
DOI：
10.1088/0960-1317/17/1/008
复制
发表时间：
2006
影响因子：
2.3
通讯作者：
Yuh-Chung Hu;C. Wei
中科院分区：
文献类型：
--
作者：
Yuh-Chung Hu;C. Wei
本文推导了一种确定微弯曲梁在静电载荷作用下吸合电压的高精度解析解。分析模型考虑了微弯曲梁与地平面之间的边缘场以及应力梯度引起的初始弯曲。此外，机电耦合效应也涉及到本分析模型。利用能量法得到了吸合电压的解析解。通过与其他已发表的解析模型以及实验测量数据的比较，验证了本文解析解的准确性比其他已发表的著作更准确。当梁的长宽比大于5时，本文的解析解可以确定吸合电压，与实验测量结果的最大偏差为1%。
This paper derives a high precision analytical solution to determine the pull-in voltages of a micro curled beam subjected to electrostatic loads. The analytical model considers the fringing fields between the micro curled beam and the ground plane as well as the initial curling induced by the stress gradient. Furthermore, the electromechanical coupling effects are also involved in the present analytical model. Then the analytical solution of pull-in voltage is obtained by the energy method. By comparing with the other published analytical models as well as the experimentally measured data, the accuracy of the present analytical solution is verified to be more accurate than the other published works. The present analytical solution can determine the pull-in voltage with a maximum deviation of 1% from the experimentally measured results as the ratio of the beam length to the width is greater than 5.