Seismic Recording Using A Mode Localized MEMS Accelerometer

Seismic Recording Using A Mode Localized MEMS Accelerometer
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DOI：
10.1109/transducers.2019.8808572
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发表时间：
2019-06
期刊：
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
影响因子：
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通讯作者：
Milind S. Pandit;Chun Zhao;G. Sobreviela;X. Zou;A. Seshia
Milind S. Pandit;Chun Zhao;G. Sobreviela;X. Zou;A. Seshia
中科院分区：
其他
文献类型：
--
作者：
Milind S. Pandit;Chun Zhao;G. Sobreviela;X. Zou;A. Seshia

文献摘要

相似文献

本文报道了模态局部化谐振加速度计（MLRXL）作为地震计的首次演示。原型传感器在对应于1.22振幅比的定义工作点处展示了4.5μg/kHz的噪声基底。位于英国剑桥的设备于2018年6月9日记录了一次3.8级地震，震中位于英国格里姆斯比。这种测量表明，模式本地化的MEMS加速度计被用于地震应用的潜力与现有的地震仪的性能相当，特别是与长期测量。
This paper reports the first demonstration of a mode localized resonant accelerometer (MLRXL) as a seismometer. The prototype sensor demonstrates a noise floor of 4.5μg/√Hz at a defined operating point corresponding to an amplitude ratio of 1.22. The device situated in Cambridge, UK recorded an earthquake of magnitude 3.8 with the epicenter at Grimsby, UK on the 9th of June, 2018. This measurement demonstrates the potential for mode localized MEMS accelerometers to be utilized for seismic applications with comparable performance to existing seismometers, with particular relevance to long-period measurements.