The Focused Ion Beam Instrument
The Focused Ion Beam Instrument
复制标题
聚焦离子束仪器
DOI：
10.1007/0-387-23313-x_1
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
B. Prenitzer
中科院分区：
文献类型：
--
作者：
F. Stevie;L. Giannuzzi;B. Prenitzer
典型的聚焦离子束（FIB）仪器由真空系统、液态金属离子源、离子柱、平台、检测器、进气口和计算机组成。液态金属离子源提供精细聚焦的离子束，其使得材料的高横向分辨率去除成为可能。五轴电动同心平台运动允许以各种角度快速溅射到样品。离子束与有机金属物质的相互作用促进金属或绝缘物质的位点特异性沉积。其它气体可用于增强材料的蚀刻。扫描电子显微镜柱和FIB柱的组合形成提供增强能力的双平台系统。
The typical focused ion beam (FIB) instrument consists of a vacuum system, liquid metal ion source, ion column, stage, detectors, gas inlets, and computer. The liquid metal ion source provides the finely focused ion beam that makes possible high lateral resolution removal of material. Five axis motorized eucentric stage motion allows rapid sputtering at various angles to the specimen. The ion beam interaction with organo-metallic species facilitates site specific deposition of metallic or insulating species. Other gases may be used for enhanced etching of materials. The combination of a scanning electron microscope column and a FIB column forms a dual platform system that provides enhanced capabilities.