Inner-paddled atomic force microscopy cantilever for rapid mechanical mapping
Inner-paddled atomic force microscopy cantilever for rapid mechanical mapping
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DOI：
10.1016/j.sna.2023.114488
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发表时间：
2023-09
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影响因子：
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通讯作者：
Xu Yang;Chengfu Ma;Xiuxiang Wang;Chenggang Zhou
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文献类型：
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作者：
Xu Yang;Chengfu Ma;Xiuxiang Wang;Chenggang Zhou
纳米尺度的力学表征方法对于纳米材料、微纳米器件和纳米力学等许多领域都具有至关重要的意义。原子力显微镜（AFM）作为纳米技术的关键工具，由于其高分辨率的形貌成像能力而被广泛应用，也被认为是纳米尺度力学表征的有用平台。接触共振AFM是一种重要的粘弹性表征AFM方法，它通过超声频率调制样品端与样品的接触，然后分析悬臂梁的共振响应。然而，接触共振AFM需要悬臂梁的接触共振频率和质量因子值来量化样品的弹性模量和损失切线。这需要耗时的频率扫描，使得定量扫描不切实际，因此通常只采用单点定量测量和定性单频扫描。为了解决这一问题，本文提出了一种具有集成内桨子结构的AFM悬臂设计，该设计提供了共振保持一致的特征模态，但其共振幅值随接触刚度的变化而变化。利用该探针，希望通过快速单频振幅成像来量化样品的弹性特性。
Mechanical characterization methods at the nanoscale are of critical importance for many fields including nanomaterials, micro/nano devices and nanomechanics. As a key tool in nanotechnology, atomic force microscopy (AFM) is widely used due to its high-resolution topography imaging capabilities, and is also recognized as a useful platform for nanoscale mechanical characterization. Contact-resonance AFM, which modulates the tip-sample contact with ultrasonic frequencies and then analyzes the cantilever’s resonance responses, is an important AFM method for viscoelastic characterization. However, contact-resonance AFM requires the cantilever’s contact-resonance frequency and quality factor values to quantify the elastic modulus and loss tangent of the sample. This requires time-consuming frequency sweep, which makes a quantitative scanning impractical, therefore only single-point quantitative measurement and qualitative single-frequency scanning are usually applied. To address this issue, here we present an AFM cantilever design with an integrated inner-paddle substructure, which provides an eigenmode whose resonance keeps consistent, but whose resonance amplitude varies with varying contact stiffness. With this probe, it is hoped to quantify the elastic properties of the sample with fast single-frequency amplitude imaging.