On the mechanism of secondary pop-out in cyclic nanoindentation of single-crystal silicon
On the mechanism of secondary pop-out in cyclic nanoindentation of single-crystal silicon
复制标题
DOI：
10.1557/jmr.2015.120
复制
发表时间：
2015-06-14
影响因子：
2.7
通讯作者：
Yan, Jiwang
中科院分区：
文献类型：
--
作者：
Huang, Hu;Yan, Jiwang
在单晶硅的循环纳米压痕实验中，出现了一个有趣的现象：第二次弹出事件紧随第一次弹出事件之后，但其临界载荷比第一次大。在不同加载/卸载速率和不同最大压痕载荷下进行了循环纳米压痕实验，以验证两个弹出事件现象的普遍性。拉曼光谱结果表明，二次弹出事件并未诱导任何新相，并且两次弹出事件后的主导结束相仍然是Si-XII/Si-III相的混合物。根据平均接触压力分析，从晶体形核和生长的角度讨论了二次弹出的相变途径和形成机制。结果表明，Si-I相到Si-XII/Si-III相的相变是在两个相邻的压痕循环中通过两次弹出事件完成的，前一个压痕循环中形成的Si-XII/Si-III相强烈影响后续加载/卸载过程中的相变。
In cyclic nanoindentation of single-crystal silicon, an interesting phenomenon of a secondary pop-out event that closely follows the first pop- out event but with a larger critical load than the first is presented. Cyclic nanoindentation experiments under various loading/unloading rates and various maximum indentation loads were performed to verify the generality of the phenomenon of two pop- out events. Raman spectroscopy results indicate that the secondary pop- out does not induce any new phase, and the dominated end phases after the two pop- out events are still a mixture of Si-XII/Si-III phases. According to average contact pressure analysis, the phase transformation paths and the formation mechanism for the secondary pop- out event are discussed from the viewpoint of crystal nucleation and growth. The results indicate that phase transformations from the Si-I phase to Si-XII/Si-III phases are completed by two pop- out events in two adjacent indentation cycles, and the Si-XII/Si-III phases formed in previous indentation cycles strongly affect the phase transformations in subsequent loading/unloading processes.