Use of the Degenerated Reynolds Equation in Solving the Microchannel Flow Problem
Use of the Degenerated Reynolds Equation in Solving the Microchannel Flow Problem
复制标题
利用简并雷诺方程求解微通道流动问题
DOI：
10.1063/1.1867474
复制
发表时间：
2005
影响因子：
4.6
通讯作者：
C. Shen
中科院分区：
文献类型：
--
作者：
C. Shen
在本文中，作者提出，气膜润滑问题中使用的广义雷诺方程（其中泊肃叶流的流速由玻尔兹曼方程计算）可以退化来求解微通道。 flow problem in the transitional regime.使用这种方法，长微通道中压力分布的计算结果与实验数据和信息保存（IP）方法的结果非常吻合。短微通道的结果与直接模拟蒙特卡罗方法和 IP 方法表现出极好的一致性。通过与简并雷诺方程计算的比较来检验微通道流动的格子玻尔兹曼法解，压力分布的不一致证实了格子玻尔兹曼法不适合求解过渡状态下的微机电系统（MEMS）流动。对于微通道流动，简并雷诺方程可以作为具有动力学理论优点的准则，用于测试旨在解决过渡流态中MEMS器件中稀薄气体流动问题的各种方法。
In this paper, the author proposes that the generalized Reynolds equation employed in the gas film lubrication problems, where the flow rates of the Poiseuille flow are calculated from the Boltzmann equation, can be degenerated for solving the microchannel. flow problem in the transitional regime. Using this approach, the calculated results of pressure distribution in long microchannels show excellent agreement with the experimental data and the result of the information preservation (IP) method. The results in short microchannels show excellent agreement with the direct simulation Monte Carlo method and the IP method. The lattice Boltzmann method solution of the microchannel flow is examined by comparison with the degenerated Reynolds equation calculations and the disagreement in the pressure distribution confirms that the lattice Boltzmann method is unsuitable for the solution of the microelectromechanical systems (MEMS) flows in transitional regime. For microchannel flows, the degenerated Reynolds equation can serve as a criterion having the merits of kinetic theory for testing various methods intending to solve rarefied gas flow problems in MEMS devices in the transitional flow regime.