Mode changes of surface wave on the interface between dielectric rod and microwave plasma with increasing plasma density
Mode changes of surface wave on the interface between dielectric rod and microwave plasma with increasing plasma density
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DOI：
10.1209/0295-5075/100/25001
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发表时间：
2012-10
期刊：
影响因子：
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通讯作者：
Zhonghang Wu;Xijiang Chang;Long He;Zebin Li;Jiaqi Ju;Huanzhong Gao;Z. He;Wei-zhuang Cheng;Q. Ou;Rongqing Liang
中科院分区：
文献类型：
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作者：
Zhonghang Wu;Xijiang Chang;Long He;Zebin Li;Jiaqi Ju;Huanzhong Gao;Z. He;Wei-zhuang Cheng;Q. Ou;Rongqing Liang
本实验室研制了一种圆柱形介质波导表面波等离子体源。聚四氟乙烯棒被用作波导，微波可以激发周围的等离子体。随着微波功率的增大，介电棒与等离子体界面表面波的传输模式发生了变化。表面波的截止频率随等离子体密度的增大而减小。表面波的透射模式由无等离子体或低等离子体密度时的HE11模式转变为等离子体密度8.9 × 1011 cm−3时的TM01和TE01的简并模式。
A surface-wave plasma source with a cylindrical dielectric waveguide has been developed in our laboratory. A Teflon rod was used as waveguide where the microwave could excite the plasma around it. The transmitting modes of the surface wave on the interface between a dielectric rod and plasma changed with increasing microwave power. It was observed that the cutoff frequency of the surface wave decreased with the increase of the plasma density. And the transmitting modes of the surface wave changed from HE11 mode under no plasma or low plasma density to the degenerate mode of TM01 and TE01 with plasma density 8.9 × 1011 cm−3.