High-accuracy standard specimens for the line-focus-beam ultrasonic material characterization system
High-accuracy standard specimens for the line-focus-beam ultrasonic material characterization system
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线聚焦束超声材料表征系统的高精度标准样品
DOI：
10.1109/tuffc.2002.1009343
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
R. Okabe
中科院分区：
文献类型：
--
作者：
J. Kushibiki;M. Arakawa;R. Okabe
我们准备了标准样品的线聚焦束超声材料表征系统，以获得泄漏表面声波（LSAW）的传播特性（相速度和衰减）的绝对值。该表征系统对于样品表面的评价和分析是非常有用的。这些声学参数的校准精度取决于对标准样品确定的声学物理常数（弹性常数、压电常数、介电常数和密度）的精度。在本文中，我们开发了非压电单晶（即，钆镓石榴石[GGG]、Si和Ge）和各向同性固体（合成二氧化硅[SiO/sub 2/]玻璃）作为标准样品。这些样品可以覆盖瑞利型LSAW的相速度范围为2600至5100 m/s。为了高精度地确定弹性常数，我们通过复模式测量方法测量了速度，并校正了衍射效应。体声波特性（体波速度和密度）的测量在23/spl deg/C左右进行，并获得体波速度，精度在/spl plusmn/0.004%以内。通过将获得的结果与先前公布的值进行比较，我们清楚地检测到声学特性的差异;这些差异被认为是由于所使用的样本的差异。我们还发现了不同厂家生产的四种SiO/sub 2/基板的声学性能差异。
We prepared standard specimens for the line-focus-beam ultrasonic material characterization system to obtain absolute values of the propagation characteristics (phase velocity and attenuation) of leaky surface acoustic waves (LSAWs). The characterization system is very useful for evaluating and analyzing specimen surfaces. The calibration accuracy of these acoustic parameters depends on the accuracy of acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants, and density) determined for standard specimens. In this paper, we developed substrates of non piezoelectric single crystals (viz., gadolinium gallium garnet [GGG], Si, and Ge) and an isotropic solid (synthetic silica [SiO/sub 2/] glass) as standard specimens. These specimens can cover the phase velocity range of 2600 to 5100 m/s for Rayleigh-type LSAWs. To determine the elastic constants with high accuracy, we measured velocities by the complex-mode measurement method and corrected diffraction effects. Measurements of bulk acoustic properties (bulk wave velocity and density) were conducted around 23/spl deg/C, and bulk wave velocities were obtained with an accuracy of within /spl plusmn/0.004%. We clearly detected differences in acoustic properties by comparing the obtained results with the previously published values; the differences were considered to be due to differences of the specimens used. We also detected differences in acoustic properties among four SiO/sub 2/ substrates produced by different manufacturers.