Denoising Particle Beam Micrographs With Plug-and-Play Methods
Denoising Particle Beam Micrographs With Plug-and-Play Methods
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DOI：
10.1109/tci.2023.3282042
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发表时间：
2022-08
影响因子：
5.4
通讯作者：
Minxu Peng;Ruangrawee Kitichotkul;Sheila W. Seidel;Christopher C. Yu;V. Goyal
中科院分区：
文献类型：
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作者：
Minxu Peng;Ruangrawee Kitichotkul;Sheila W. Seidel;Christopher C. Yu;V. Goyal
在粒子束显微镜中，栅格扫描的聚焦粒子束与样品相互作用，逐个像素地产生二次电子(SE)信号。由于采集时间和剂量的限制，常规形成的显微照片存在噪声。最近的工作表明，适用于时间分辨测量范式的估计方法可以极大地降低噪声，但这些方法不需要利用图像结构来逐个像素地应用。原始SE计数数据可以用复合泊松(Neyman Type A)似然进行建模，这意味着数据方差依赖于信号，并且大于潜在颗粒-样品相互作用中的变化。这些统计特性使得假设加性高斯白噪声的方法无效。本文介绍了利用即插即用框架开发图像结构的粒子束显微图像去噪方法，同时适用于这种模式的异常数据可能性。将精度和计算复杂性不同的数据似然近似与总变分正则化、BM3D和DnCNN的去噪相结合。假设SE计数可用，则提供了用于常规测量和时间分辨测量的方法。在以氦离子显微镜和扫描电子显微镜为代表的模拟中，在均方根误差(RMSE)、结构相似指数(SSIM)和定性外观方面都得到了显著的改善。RMSE的平均降幅从2.24到4.11不等。
In a particle beam microscope, a raster-scanned focused beam of particles interacts with a sample to generate a secondary electron (SE) signal pixel by pixel. Conventionally formed micrographs are noisy because of limitations on acquisition time and dose. Recent work has shown that estimation methods applicable to a time-resolved measurement paradigm can greatly reduce noise, but these methods apply pixel by pixel without exploiting image structure. Raw SE count data can be modeled with a compound Poisson (Neyman Type A) likelihood, which implies data variance that is signal-dependent and greater than the variation in the underlying particle–sample interaction. These statistical properties make methods that assume additive white Gaussian noise ineffective. This article introduces methods for particle beam micrograph denoising that use the plug-and-play framework to exploit image structure while being applicable to the unusual data likelihoods of this modality. Approximations of the data likelihood that vary in accuracy and computational complexity are combined with denoising by total variation regularization, BM3D, and DnCNN. Methods are provided for both conventional and time-resolved measurements, assuming SE counts are available. In simulations representative of helium ion microscopy and scanning electron microscopy, significant improvements in root mean-squared error (RMSE), structural similarity index measure (SSIM), and qualitative appearance are obtained. Average reductions in RMSE are by factors ranging from 2.24 to 4.11.