A hydrogen sensor based on Mg–Pd alloy thin film
A hydrogen sensor based on Mg–Pd alloy thin film
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DOI：
10.1088/0957-0233/18/11/011
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发表时间：
2007-09
影响因子：
2.4
通讯作者：
K. Yoshimura;S. Nakano;S. Uchinashi;S. Yamaura;H. Kimura;A. Inoue
中科院分区：
文献类型：
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作者：
K. Yoshimura;S. Nakano;S. Uchinashi;S. Yamaura;H. Kimura;A. Inoue
本文报道了用直流磁控溅射法制备的Pd包覆Mg-Pd合金薄膜的氢敏特性。Pd包覆的Mg_（0.9）Pd_（0.1）薄膜厚度为10 nm Pd和40 nm Mg-Pd，在室温下对含氢气氛具有良好的氢敏性能。它们的敏感范围是从40 ppm到4%的Ar中的氢。这些薄膜被认为是低成本室温氢传感器的候选者。
We report on the hydrogen sensing property of Pd-capped Mg–Pd alloy thin films which were prepared by dc magnetron sputtering. Pd-capped Mg0.9Pd0.1 films of thicknesses 10 nm Pd and 40 nm Mg–Pd show a good hydrogen sensing property for hydrogen-containing atmosphere at room temperature. Their sensing range is from 40 ppm to 4% hydrogen in Ar. These films are supposed to be candidates for a low-cost room temperature hydrogen sensor.