DFM Evaluation Using IC Diagnosis Data
DFM Evaluation Using IC Diagnosis Data
复制标题
使用 IC 诊断数据进行 DFM 评估
DOI：
--
复制
发表时间：
2017
影响因子：
2.9
通讯作者：
Xin Li
中科院分区：
文献类型：
--
作者：
R. D. Blanton;Fa Wang;Cheng Xue;P. Nag;Yang Xue;Xin Li
使用制造硅（DREAMS）的可制造性规则评估设计是一种综合方法，用于评估一组可制造性设计（DFM）规则的保产能力，该规则使用对失效ic执行的逻辑诊断结果。DREAMS是对现有技术的改进，因为在诊断候选者和整个设计中考虑了违反规则的分布以及故障的性质（例如，桥式与开放式），以适当地权衡规则。硅和仿真结果证明了DREAMS方法的有效性。具体地说，虚拟数据用于证明，即使在非理想诊断解决方案固有的模糊性以及与直觉相反的相应规则违反分布的情况下，也可以可靠地识别导致故障的DFM规则。我们还表明，物理感知诊断和违反DFM规则的性质相结合可以进一步改善规则评估。将DREAMS应用于产芯片的诊断结果，可以提供有价值的见解，了解特定DFM规则如何提高（或不提高）特定设施中制造的给定设计的良率。最后，我们还证明了DREAMS的一个重要工件是诊断分辨率的显着提高。这意味着除了识别最无效的DFM规则之外，由于诊断分辨率的相应改进，可以通过对故障芯片的物理故障分析来验证该结果。
Design for manufacturability rule evaluation using manufactured silicon (DREAMS) is a comprehensive methodology for evaluating the yield-preserving capabilities of a set of design for manufacturability (DFM) rules using the results of logic diagnosis performed on failed ICs. DREAMS is an improvement over prior art in that the distribution of rule violations over the diagnosis candidates and the entire design are taken into account along with the nature of the failure (e.g., bridge versus open) to appropriately weight the rules. Silicon and simulation results demonstrate the efficacy of the DREAMS methodology. Specifically, virtual data is used to demonstrate that the DFM rule most responsible for failure can be reliably identified even in light of the ambiguity inherent to a nonideal diagnostic resolution, and a corresponding rule-violation distribution that is counter-intuitive. We also show that the combination of physically aware diagnosis and the nature of the violated DFM rule can be used together to improve rule evaluation even further. Application of DREAMS to the diagnostic results from an in-production chip provides valuable insight in how specific DFM rules improve yield (or not) for a given design manufactured in particular facility. Finally, we also demonstrate that a significant artifact of DREAMS is a dramatic improvement in diagnostic resolution. This means that in addition to identifying the most ineffective DFM rule(s), validation of that outcome via physical failure analysis of failed chips can be eased due to the corresponding improvement in diagnostic resolution.